Chemical characterization of plasma-polymerized hexamethyldisilazane by nuclear elastic recoil detection

R. Groleau, John F. Currie, Michael R. Wertheimer, Jolanta-Ewa Sapieha and Wang Ke-Ming

Article (1986)

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Department:	Department of Engineering Physics
Research Center:	GCM - Thin Film Physics and Technology Research Group
PolyPublie URL:	https://publications.polymtl.ca/38171/
Journal Title:	Thin Solid Films (vol. 136, no. 1)
Publisher:	Elsevier
DOI:	10.1016/0040-6090(86)90111-2
Official URL:	https://doi.org/10.1016/0040-6090%2886%2990111-2
Date Deposited:	18 Apr 2023 15:26
Last Modified:	08 Apr 2025 07:00

Cite in APA 7:	Groleau, R., Currie, J. F., Wertheimer, M. R., Sapieha, J.-E., & Ke-Ming, W. (1986). Chemical characterization of plasma-polymerized hexamethyldisilazane by nuclear elastic recoil detection. Thin Solid Films, 136(1), 85-92. https://doi.org/10.1016/0040-6090%2886%2990111-2
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