Comparison of microwave and lower-frequency discharges for plasma polymerization

R. Claude, M. Moisan, Michael R. Wertheimer and Z. Zakrzewski

Article (1987)

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Department:	Department of Engineering Physics
PolyPublie URL:	https://publications.polymtl.ca/38148/
Journal Title:	Plasma Chemistry and Plasma Processing (vol. 7, no. 4)
Publisher:	Springer
DOI:	10.1007/bf01030489
Official URL:	https://doi.org/10.1007/bf01030489
Date Deposited:	18 Apr 2023 15:26
Last Modified:	25 Sep 2024 16:22

Cite in APA 7:	Claude, R., Moisan, M., Wertheimer, M. R., & Zakrzewski, Z. (1987). Comparison of microwave and lower-frequency discharges for plasma polymerization. Plasma Chemistry and Plasma Processing, 7(4), 451-464. https://doi.org/10.1007/bf01030489
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