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Comparison of microwave and lower-frequency discharges for plasma polymerization

R. Claude, M. Moisan, Michael R. Wertheimer and Z. Zakrzewski

Article (1987)

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Department: Department of Engineering Physics
PolyPublie URL: https://publications.polymtl.ca/38148/
Journal Title: Plasma Chemistry and Plasma Processing (vol. 7, no. 4)
Publisher: Springer
DOI: 10.1007/bf01030489
Official URL: https://doi.org/10.1007/bf01030489
Date Deposited: 18 Apr 2023 15:26
Last Modified: 05 Apr 2024 11:32
Cite in APA 7: Claude, R., Moisan, M., Wertheimer, M. R., & Zakrzewski, Z. (1987). Comparison of microwave and lower-frequency discharges for plasma polymerization. Plasma Chemistry and Plasma Processing, 7(4), 451-464. https://doi.org/10.1007/bf01030489

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