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Generation of large volume microwave plasmas

R. G. Bosisio, Michael R. Wertheimer and C. F. Weissfloch

Article (1973)

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Department: Department of Engineering Physics
PolyPublie URL: https://publications.polymtl.ca/38144/
Journal Title: Journal of Physics E: Scientific Instruments (vol. 6, no. 7)
Publisher: IOP Publishing
DOI: 10.1088/0022-3735/6/7/013
Official URL: http://stacks.iop.org/0022-3735/6/i=7/a=013
Date Deposited: 18 Apr 2023 15:26
Last Modified: 05 Apr 2024 11:32
Cite in APA 7: Bosisio, R. G., Wertheimer, M. R., & Weissfloch, C. F. (1973). Generation of large volume microwave plasmas. Journal of Physics E: Scientific Instruments, 6(7), 628-628. http://stacks.iop.org/0022-3735/6/i=7/a=013

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