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Durable AlN and Al2O3optical films deposited by low duty cycle pulsed magnetron sputtering

Jiří Kohout, Thomas Schmitt, Richard Vernhes, Oleg Zabeida, Jolanta-Ewa Sapieha and Ludvik Martinu

Paper (2016)

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Department: Department of Engineering Physics
PolyPublie URL: https://publications.polymtl.ca/37453/
Conference Title: Optical Interference Coatings (OIC 2016)
Conference Location: Tucson, AZ, United states
Conference Date(s): 2016-06-19 - 2016-06-24
Publisher: Optical Society of America (OSA)
DOI: 10.1364/oic.2016.wa.6
Official URL: https://doi.org/10.1364/oic.2016.wa.6
Date Deposited: 18 Apr 2023 15:05
Last Modified: 25 Sep 2024 16:21
Cite in APA 7: Kohout, J., Schmitt, T., Vernhes, R., Zabeida, O., Sapieha, J.-E., & Martinu, L. (2016, June). Durable AlN and Al2O3optical films deposited by low duty cycle pulsed magnetron sputtering [Paper]. Optical Interference Coatings (OIC 2016), Tucson, AZ, United states. https://doi.org/10.1364/oic.2016.wa.6

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