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Energy Conversion Efficiency in Low- and Atmospheric-Pressure Plasma Polymerization Processes, Part II: HMDSO

Dirk Hegemann, Bernard Nisol, Sean Watson and Michael R. Wertheimer

Article (2016)

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Department: Department of Engineering Physics
PolyPublie URL: https://publications.polymtl.ca/36222/
Journal Title: Plasma Chemistry and Plasma Processing (vol. 37, no. 1)
Publisher: Springer
DOI: 10.1007/s11090-016-9754-x
Official URL: https://doi.org/10.1007/s11090-016-9754-x
Date Deposited: 18 Apr 2023 15:05
Last Modified: 05 Apr 2024 11:29
Cite in APA 7: Hegemann, D., Nisol, B., Watson, S., & Wertheimer, M. R. (2016). Energy Conversion Efficiency in Low- and Atmospheric-Pressure Plasma Polymerization Processes, Part II: HMDSO. Plasma Chemistry and Plasma Processing, 37(1), 257-271. https://doi.org/10.1007/s11090-016-9754-x

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