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Toward a better understanding of the influence of the hydrocarbon precursor on the mechanical properties of a-C:H coatings synthesized by a hybrid PECVD/PVD method

Damien Thiry, Aurore De Vreese, Fabian Renaux, Julien L. Colaux, Stéphane Lucas, Yannick Guinet, Laurent Paccou, Étienne Bousser and Rony Snyders

Article (2016)

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Department: Department of Engineering Physics
PolyPublie URL: https://publications.polymtl.ca/36146/
Journal Title: Plasma Processes and Polymers (vol. 13, no. 3)
Publisher: Wiley-VCH
DOI: 10.1002/ppap.201500050
Official URL: https://doi.org/10.1002/ppap.201500050
Date Deposited: 18 Apr 2023 15:06
Last Modified: 05 Apr 2024 11:29
Cite in APA 7: Thiry, D., De Vreese, A., Renaux, F., Colaux, J. L., Lucas, S., Guinet, Y., Paccou, L., Bousser, É., & Snyders, R. (2016). Toward a better understanding of the influence of the hydrocarbon precursor on the mechanical properties of a-C:H coatings synthesized by a hybrid PECVD/PVD method. Plasma Processes and Polymers, 13(3), 316-323. https://doi.org/10.1002/ppap.201500050

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