M. Tabbal, R. Izquierdo, Michel Meunier
and Arthur Yelon
Paper (1992)
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| Department: | Department of Engineering Physics |
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| Research Center: | GCM - Thin Film Physics and Technology Research Group |
| Funders: | Fonds FCAR of Québec, NSERC/CRSNG |
| PolyPublie URL: | https://publications.polymtl.ca/35829/ |
| Conference Title: | 1992 MRS Fall Meeting |
| Conference Location: | Boston, Mass. |
| Conference Date(s): | 1992-11-30 - 1992-12-04 |
| Journal Title: | MRS Proceedings (vol. 282) |
| Publisher: | Materials Research Society |
| DOI: | 10.1557/proc-282-191 |
| Official URL: | https://doi.org/10.1557/proc-282-191 |
| Date Deposited: | 18 Apr 2023 15:26 |
| Last Modified: | 25 Sep 2024 16:19 |
| Cite in APA 7: | Tabbal, M., Izquierdo, R., Meunier, M., & Yelon, A. (1992, November). Surface Interaction Between WF₆ and GaAs Under UV Laser Illumination [Paper]. 1992 MRS Fall Meeting, Boston, Mass.. Published in MRS Proceedings, 282. https://doi.org/10.1557/proc-282-191 |
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