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Surface Interaction Between WF₆ and GaAs Under UV Laser Illumination

M. Tabbal, R. Izquierdo, Michel Meunier and Arthur Yelon

Paper (1992)

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Department: Department of Engineering Physics
Research Center: GCM - Thin Film Physics and Technology Research Group
Funders: Fonds FCAR of Québec, NSERC/CRSNG
PolyPublie URL: https://publications.polymtl.ca/35829/
Conference Title: 1992 MRS Fall Meeting
Conference Location: Boston, Mass.
Conference Date(s): 1992-11-30 - 1992-12-04
Journal Title: MRS Proceedings (vol. 282)
Publisher: Materials Research Society
DOI: 10.1557/proc-282-191
Official URL: https://doi.org/10.1557/proc-282-191
Date Deposited: 18 Apr 2023 15:26
Last Modified: 05 Apr 2024 11:28
Cite in APA 7: Tabbal, M., Izquierdo, R., Meunier, M., & Yelon, A. (1992, November). Surface Interaction Between WF₆ and GaAs Under UV Laser Illumination [Paper]. 1992 MRS Fall Meeting, Boston, Mass.. Published in MRS Proceedings, 282. https://doi.org/10.1557/proc-282-191

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