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The Reduction of Cuᴵᴵ Compounds by Excimer Laser Irradiation for Copper Metal Deposition

M. Suys, B. Moffat, M. H. Bernier, R. Izquierdo, S. Poulin, Michel Meunier and Edward Sacher

Paper (1992)

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Department: Department of Engineering Physics
PolyPublie URL: https://publications.polymtl.ca/35827/
Conference Title: 1992 MRS Fall Meeting
Conference Location: Boston, Mass.
Conference Date(s): 1992-11-30 - 1992-12-04
Journal Title: MRS Proceedings (vol. 282)
Publisher: Materials Research Society
DOI: 10.1557/proc-282-179
Official URL: https://doi.org/10.1557/proc-282-179
Date Deposited: 18 Apr 2023 15:26
Last Modified: 05 Apr 2024 11:28
Cite in APA 7: Suys, M., Moffat, B., Bernier, M. H., Izquierdo, R., Poulin, S., Meunier, M., & Sacher, E. (1992, November). The Reduction of Cuᴵᴵ Compounds by Excimer Laser Irradiation for Copper Metal Deposition [Paper]. 1992 MRS Fall Meeting, Boston, Mass.. Published in MRS Proceedings, 282. https://doi.org/10.1557/proc-282-179

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