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KrF excimer laser direct writing of titanium lines: modeling and application to the fabrication of Ti:Linbo₃ waveguides

Michel Meunier, C. Lavoie, S. Boivin, R. Izquierdo, Patrick Desjardins and S. I. Najafi

Paper (1990)

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Department: Department of Engineering Physics
Research Center: GCM - Thin Film Physics and Technology Research Group
Funders: CRSNG / NSERC, Fondation des Diplômés de Polytechnique
PolyPublie URL: https://publications.polymtl.ca/35794/
Conference Title: 1990 MRS Fall Meeting
Conference Location: Boston, Mass.
Conference Date(s): 1990-11-26 - 1990-12-01
Journal Title: MRS Proceedings (vol. 201)
Publisher: Materials Research Society
DOI: 10.1557/proc-201-625
Official URL: https://doi.org/10.1557/proc-201-625
Date Deposited: 18 Apr 2023 15:26
Last Modified: 05 Apr 2024 11:28
Cite in APA 7: Meunier, M., Lavoie, C., Boivin, S., Izquierdo, R., Desjardins, P., & Najafi, S. I. (1990, November). KrF excimer laser direct writing of titanium lines: modeling and application to the fabrication of Ti:Linbo₃ waveguides [Paper]. 1990 MRS Fall Meeting, Boston, Mass.. Published in MRS Proceedings, 201. https://doi.org/10.1557/proc-201-625

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