Modeling KrF excimer laser induced deposition of titanium from titanium tetrachloride

Michel Meunier, C. Lavoie, S. Boivin, R. Izquierdo and Patrick Desjardins

Article (1992)

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Department:	Department of Engineering Physics
Research Center:	GCM - Thin Film Physics and Technology Research Group
PolyPublie URL:	https://publications.polymtl.ca/35793/
Journal Title:	Applied Surface Science (vol. 54)
Publisher:	Elsevier
DOI:	10.1016/0169-4332(92)90016-q
Official URL:	https://doi.org/10.1016/0169-4332%2892%2990016-q
Date Deposited:	18 Apr 2023 15:26
Last Modified:	25 Sep 2024 16:19

Cite in APA 7:	Meunier, M., Lavoie, C., Boivin, S., Izquierdo, R., & Desjardins, P. (1992). Modeling KrF excimer laser induced deposition of titanium from titanium tetrachloride. Applied Surface Science, 54, 52-55. https://doi.org/10.1016/0169-4332%2892%2990016-q
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