<  Back to the Polytechnique Montréal portal

Modeling KrF excimer laser induced deposition of titanium from titanium tetrachloride

Michel Meunier, C. Lavoie, S. Boivin, R. Izquierdo and Patrick Desjardins

Article (1992)

An external link is available for this item
Department: Department of Engineering Physics
Research Center: GCM - Thin Film Physics and Technology Research Group
PolyPublie URL: https://publications.polymtl.ca/35793/
Journal Title: Applied Surface Science (vol. 54)
Publisher: Elsevier
DOI: 10.1016/0169-4332(92)90016-q
Official URL: https://doi.org/10.1016/0169-4332%2892%2990016-q
Date Deposited: 18 Apr 2023 15:26
Last Modified: 05 Apr 2024 11:28
Cite in APA 7: Meunier, M., Lavoie, C., Boivin, S., Izquierdo, R., & Desjardins, P. (1992). Modeling KrF excimer laser induced deposition of titanium from titanium tetrachloride. Applied Surface Science, 54, 52-55. https://doi.org/10.1016/0169-4332%2892%2990016-q

Statistics

Dimensions

Repository Staff Only

View Item View Item