Michel Meunier
, C. Lavoie, S. Boivin, R. Izquierdo and Patrick Desjardins
Article (1992)
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| Department: | Department of Engineering Physics |
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| Research Center: | GCM - Thin Film Physics and Technology Research Group |
| PolyPublie URL: | https://publications.polymtl.ca/35793/ |
| Journal Title: | Applied Surface Science (vol. 54) |
| Publisher: | Elsevier |
| DOI: | 10.1016/0169-4332(92)90016-q |
| Official URL: | https://doi.org/10.1016/0169-4332%2892%2990016-q |
| Date Deposited: | 18 Apr 2023 15:26 |
| Last Modified: | 25 Sep 2024 16:19 |
| Cite in APA 7: | Meunier, M., Lavoie, C., Boivin, S., Izquierdo, R., & Desjardins, P. (1992). Modeling KrF excimer laser induced deposition of titanium from titanium tetrachloride. Applied Surface Science, 54, 52-55. https://doi.org/10.1016/0169-4332%2892%2990016-q |
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