Michel Meunier
, R. Izquierdo, Patrick Desjardins, M. Tabbal, A. Lecours and Arthur Yelon
Article (1992)
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| Department: | Department of Engineering Physics |
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| Research Center: | GCM - Thin Film Physics and Technology Research Group |
| PolyPublie URL: | https://publications.polymtl.ca/35792/ |
| Journal Title: | Thin Solid Films (vol. 218, no. 1-2) |
| Publisher: | Elsevier |
| DOI: | 10.1016/0040-6090(92)90911-t |
| Official URL: | https://doi.org/10.1016/0040-6090%2892%2990911-t |
| Date Deposited: | 18 Apr 2023 15:26 |
| Last Modified: | 25 Sep 2024 16:19 |
| Cite in APA 7: | Meunier, M., Izquierdo, R., Desjardins, P., Tabbal, M., Lecours, A., & Yelon, A. (1992). Laser direct writing of tungsten from WF₆. Thin Solid Films, 218(1-2), 137-143. https://doi.org/10.1016/0040-6090%2892%2990911-t |
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