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Laser direct writing of tungsten from WF₆

Michel Meunier, R. Izquierdo, Patrick Desjardins, M. Tabbal, A. Lecours and Arthur Yelon

Article (1992)

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Department: Department of Engineering Physics
Research Center: GCM - Thin Film Physics and Technology Research Group
PolyPublie URL: https://publications.polymtl.ca/35792/
Journal Title: Thin Solid Films (vol. 218, no. 1-2)
Publisher: Elsevier
DOI: 10.1016/0040-6090(92)90911-t
Official URL: https://doi.org/10.1016/0040-6090%2892%2990911-t
Date Deposited: 18 Apr 2023 15:26
Last Modified: 05 Apr 2024 11:28
Cite in APA 7: Meunier, M., Izquierdo, R., Desjardins, P., Tabbal, M., Lecours, A., & Yelon, A. (1992). Laser direct writing of tungsten from WF₆. Thin Solid Films, 218(1-2), 137-143. https://doi.org/10.1016/0040-6090%2892%2990911-t



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