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Defining micron-scale platinum contacts on hydrogenated amorphous silicon

A. Lecours, Michel Meunier and M. Bisson

Article (1990)

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Department: Department of Engineering Physics
PolyPublie URL: https://publications.polymtl.ca/35765/
Journal Title: Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures (vol. 8, no. 1)
Publisher: American Vacuum Society
DOI: 10.1116/1.584856
Official URL: https://doi.org/10.1116/1.584856
Date Deposited: 18 Apr 2023 15:26
Last Modified: 05 Apr 2024 11:28
Cite in APA 7: Lecours, A., Meunier, M., & Bisson, M. (1990). Defining micron-scale platinum contacts on hydrogenated amorphous silicon. Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 8(1), 109-110. https://doi.org/10.1116/1.584856

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