A. Lecours, Michel Meunier
and M. Bisson
Article (1990)
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| Department: | Department of Engineering Physics |
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| PolyPublie URL: | https://publications.polymtl.ca/35765/ |
| Journal Title: | Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures (vol. 8, no. 1) |
| Publisher: | American Vacuum Society |
| DOI: | 10.1116/1.584856 |
| Official URL: | https://doi.org/10.1116/1.584856 |
| Date Deposited: | 18 Apr 2023 15:26 |
| Last Modified: | 25 Sep 2024 16:19 |
| Cite in APA 7: | Lecours, A., Meunier, M., & Bisson, M. (1990). Defining micron-scale platinum contacts on hydrogenated amorphous silicon. Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 8(1), 109-110. https://doi.org/10.1116/1.584856 |
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