A. Lecours, R. Izquierdo, M. Tabbal, Michel Meunier
and Arthur Yelon
Article (1993)
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| Department: | Department of Engineering Physics |
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| Research Center: | GCM - Thin Film Physics and Technology Research Group |
| PolyPublie URL: | https://publications.polymtl.ca/35764/ |
| Journal Title: | Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures (vol. 11, no. 1) |
| Publisher: | American Vacuum Society |
| DOI: | 10.1116/1.586725 |
| Official URL: | https://doi.org/10.1116/1.586725 |
| Date Deposited: | 18 Apr 2023 15:26 |
| Last Modified: | 25 Sep 2024 16:19 |
| Cite in APA 7: | Lecours, A., Izquierdo, R., Tabbal, M., Meunier, M., & Yelon, A. (1993). Laser induced deposition of tungsten on GaAs from WF₆. Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 11(1), 51-54. https://doi.org/10.1116/1.586725 |
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