<  Back to the Polytechnique Montréal portal

Laser induced deposition of tungsten on GaAs from WF₆

A. Lecours, R. Izquierdo, M. Tabbal, Michel Meunier and Arthur Yelon

Article (1993)

An external link is available for this item
Department: Department of Engineering Physics
Research Center: GCM - Thin Film Physics and Technology Research Group
PolyPublie URL: https://publications.polymtl.ca/35764/
Journal Title: Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures (vol. 11, no. 1)
Publisher: American Vacuum Society
DOI: 10.1116/1.586725
Official URL: https://doi.org/10.1116/1.586725
Date Deposited: 18 Apr 2023 15:26
Last Modified: 05 Apr 2024 11:28
Cite in APA 7: Lecours, A., Izquierdo, R., Tabbal, M., Meunier, M., & Yelon, A. (1993). Laser induced deposition of tungsten on GaAs from WF₆. Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 11(1), 51-54. https://doi.org/10.1116/1.586725

Statistics

Dimensions

Repository Staff Only

View Item View Item