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Large area excimer laser induced deposition of titanium from titanium tetrachloride

C. Lavoie, Michel Meunier, R. Izquierdo, S. Boivin and Patrick Desjardins

Article (1991)

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Department: Department of Engineering Physics
PolyPublie URL: https://publications.polymtl.ca/35763/
Journal Title: Applied Physics A Solids and Surfaces (vol. 53, no. 4)
Publisher: Springer
DOI: 10.1007/bf00357198
Official URL: https://doi.org/10.1007/bf00357198
Date Deposited: 18 Apr 2023 15:26
Last Modified: 05 Apr 2024 11:28
Cite in APA 7: Lavoie, C., Meunier, M., Izquierdo, R., Boivin, S., & Desjardins, P. (1991). Large area excimer laser induced deposition of titanium from titanium tetrachloride. Applied Physics A Solids and Surfaces, 53(4), 339-342. https://doi.org/10.1007/bf00357198

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