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KRF excimer laser deposition of titanium from TiCl₄

R. Izquierdo, C. Lavoie and Michel Meunier

Paper (1989)

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Department: Department of Engineering Physics
Research Center: GCM - Thin Film Physics and Technology Research Group
PolyPublie URL: https://publications.polymtl.ca/35745/
Conference Title: 1989 MRS Fall Meeting
Conference Location: Boston, Mass.
Conference Date(s): 1989-11-27 - 1989-12-02
Journal Title: MRS Proceedings (vol. 158)
Publisher: Materials Research Society
DOI: 10.1557/proc-158-141
Official URL: https://doi.org/10.1557/proc-158-141
Date Deposited: 18 Apr 2023 15:26
Last Modified: 05 Apr 2024 11:28
Cite in APA 7: Izquierdo, R., Lavoie, C., & Meunier, M. (1989, November). KRF excimer laser deposition of titanium from TiCl₄ [Paper]. 1989 MRS Fall Meeting, Boston, Mass.. Published in MRS Proceedings, 158. https://doi.org/10.1557/proc-158-141

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