R. Izquierdo, C. Lavoie, Michel Meunier
Paper (1989)
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PolyPublie URL:
Conference Title:
1989 MRS Fall Meeting
Conference Location:
Boston, Mass.
Conference Date(s):
1989-11-27 - 1989-12-02
Journal Title
:
MRS Proceedings
(
vol.
158
)
Publisher:
Materials Research Society
DOI:
Official URL:
OAI:
oai:publications.polymtl.ca:35745
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Date Deposited:
18 Apr 2023 15:26
Last Modified:
14 Oct 2026 13:25
Cite in APA 7:
Izquierdo, R., Lavoie, C., & Meunier, M. (1989, November). KRF excimer laser deposition of titanium from TiCl₄ [Paper]. 1989 MRS Fall Meeting, Boston, Mass.. Published in MRS Proceedings, 158. https://doi.org/10.1557/proc-158-141
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