Patrick Desjardins
, Ricardo Izquierdo and Michel Meunier
Article (1992)
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| Department: | Department of Engineering Physics |
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| PolyPublie URL: | https://publications.polymtl.ca/35724/ |
| Journal Title: | Canadian Journal of Physics (vol. 70, no. 10-11) |
| Publisher: | Canadian Science Publishing |
| DOI: | 10.1139/p92-142 |
| Official URL: | https://doi.org/10.1139/p92-142 |
| Date Deposited: | 18 Apr 2023 15:26 |
| Last Modified: | 08 Apr 2025 06:57 |
| Cite in APA 7: | Desjardins, P., Izquierdo, R., & Meunier, M. (1992). Dépôt par laser de WSiₓ sur du TiN à partir de WF₆ et de SiH₄. [Laser deposition of WSiₓ on TiN using a mixture of WF₆ and SiH₄]. Canadian Journal of Physics, 70(10-11), 898-903. https://doi.org/10.1139/p92-142 |
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