Patrick Desjardins
, R. Izquierdo and Michel Meunier
Paper (1991)
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| Department: | Department of Engineering Physics |
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| Research Center: | GCM - Thin Film Physics and Technology Research Group |
| PolyPublie URL: | https://publications.polymtl.ca/35723/ |
| Conference Title: | 1991 MRS Fall Meeting |
| Conference Location: | Boston, Mass. |
| Conference Date(s): | 1991-12-02 - 1991-12-06 |
| Journal Title: | MRS Proceedings (vol. 236) |
| Publisher: | Materials Research Society |
| DOI: | 10.1557/proc-236-127 |
| Official URL: | https://doi.org/10.1557/proc-236-127 |
| Date Deposited: | 18 Apr 2023 15:26 |
| Last Modified: | 25 Sep 2024 16:19 |
| Cite in APA 7: | Desjardins, P., Izquierdo, R., & Meunier, M. (1991, December). Diode laser induced chemical vapor deposition of WSiₓ from WF₆ and SiH₄ [Paper]. 1991 MRS Fall Meeting, Boston, Mass.. Published in MRS Proceedings, 236. https://doi.org/10.1557/proc-236-127 |
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