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Diode laser induced chemical vapor deposition of WSiₓ from WF₆ and SiH₄

Patrick Desjardins, R. Izquierdo and Michel Meunier

Paper (1991)

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Department: Department of Engineering Physics
Research Center: GCM - Thin Film Physics and Technology Research Group
PolyPublie URL: https://publications.polymtl.ca/35723/
Conference Title: 1991 MRS Fall Meeting
Conference Location: Boston, Mass.
Conference Date(s): 1991-12-02 - 1991-12-06
Journal Title: MRS Proceedings (vol. 236)
Publisher: Materials Research Society
DOI: 10.1557/proc-236-127
Official URL: https://doi.org/10.1557/proc-236-127
Date Deposited: 18 Apr 2023 15:26
Last Modified: 05 Apr 2024 11:28
Cite in APA 7: Desjardins, P., Izquierdo, R., & Meunier, M. (1991, December). Diode laser induced chemical vapor deposition of WSiₓ from WF₆ and SiH₄ [Paper]. 1991 MRS Fall Meeting, Boston, Mass.. Published in MRS Proceedings, 236. https://doi.org/10.1557/proc-236-127

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