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Interfaces effectives et pentes d'Urbach de multicouches a-Si:H/a-SiNₓ:H

M. Beaudoin, Michel Meunier, T. Muschik, R. Schwarz, C. J. Arsenault, M. Beaulieu and O. Grimal

Paper (1992)

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Department: Department of Engineering Physics
PolyPublie URL: https://publications.polymtl.ca/35695/
Conference Title: 6e Conférence canadienne sur la technologie des semiconducteurs
Conference Location: Ottawa, Ontario
Conference Date(s): 1992-08-11 - 1992-08-13
Journal Title: Canadian Journal of Physics (vol. 70, no. 10-11)
Publisher: Canadian Science Publishing
DOI: 10.1139/p92-130
Official URL: https://doi.org/10.1139/p92-130
Date Deposited: 18 Apr 2023 15:26
Last Modified: 25 Sep 2024 16:19
Cite in APA 7: Beaudoin, M., Meunier, M., Muschik, T., Schwarz, R., Arsenault, C. J., Beaulieu, M., & Grimal, O. (1992, August). Interfaces effectives et pentes d'Urbach de multicouches a-Si:H/a-SiNₓ:H [Effective interfaces and Urbach slope in a-Si:H/a-SiNₓ:H multilayers]. [Paper]. 6e Conférence canadienne sur la technologie des semiconducteurs, Ottawa, Ontario. Published in Canadian Journal of Physics, 70(10-11). https://doi.org/10.1139/p92-130

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