Jean-Numa Gillet, Jean-Yves Degorce, Yougui Liao and Michel Meunier
Paper (2004)
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| Department: | Department of Engineering Physics |
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| PolyPublie URL: | https://publications.polymtl.ca/35142/ |
| Conference Title: | APS March Meeting |
| Conference Location: | Montréal, Québec |
| Conference Date(s): | 2004-03-22 - 2004-03-26 |
| Date Deposited: | 18 Apr 2023 15:19 |
| Last Modified: | 25 Sep 2024 16:18 |
| Cite in APA 7: | Gillet, J.-N., Degorce, J.-Y., Liao, Y., & Meunier, M. (2004, March). Real-time modeling of modeling of ultra-shallow doping by laser annealing for next-generation CMOS [Paper]. APS March Meeting, Montréal, Québec. |
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