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Real-time modeling of modeling of ultra-shallow doping by laser annealing for next-generation CMOS

Jean-Numa Gillet, Jean-Yves Degorce, Yougui Liao and Michel Meunier

Paper (2004)

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Department: Department of Engineering Physics
PolyPublie URL: https://publications.polymtl.ca/35142/
Conference Title: APS March Meeting
Conference Location: Montréal, Québec
Conference Date(s): 2004-03-22 - 2004-03-26
Date Deposited: 18 Apr 2023 15:19
Last Modified: 05 Apr 2024 11:27
Cite in APA 7: Gillet, J.-N., Degorce, J.-Y., Liao, Y., & Meunier, M. (2004, March). Real-time modeling of modeling of ultra-shallow doping by laser annealing for next-generation CMOS [Paper]. APS March Meeting, Montréal, Québec.

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