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Preparation and characterization of thin polymer-like coatings on silicon via photo-initiated chemical vapor deposition (PICVD)

Donya Farhanian, Jason Robert Tavares and Gregory De Crescenzo

Paper (2016)

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Additional Information: Plusieurs articles pour la même URL.
Department: Department of Chemical Engineering
PolyPublie URL: https://publications.polymtl.ca/35084/
Conference Title: McGill-Polytechnique Chemical Engineering Research Day
Conference Location: Montréal, Québec
Conference Date(s): 2016-03-15
Official URL: https://www.mcgill.ca/chemeng/files/chemeng/resear...
Date Deposited: 18 Apr 2023 15:05
Last Modified: 25 Sep 2024 16:18
Cite in APA 7: Farhanian, D., Tavares, J. R., & De Crescenzo, G. (2016, March). Preparation and characterization of thin polymer-like coatings on silicon via photo-initiated chemical vapor deposition (PICVD) [Paper]. McGill-Polytechnique Chemical Engineering Research Day, Montréal, Québec. https://www.mcgill.ca/chemeng/files/chemeng/researchday2016.pdf

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