M. Panjan, S. Loquai, Jolanta-Ewa Sapieha and Ludvik Martinu
Article (2015)
An external link is available for this itemDepartment: | Department of Engineering Physics |
---|---|
PolyPublie URL: | https://publications.polymtl.ca/34943/ |
Journal Title: | Plasma Sources Science and Technology (vol. 24, no. 6) |
Publisher: | IOP Publishing |
DOI: | 10.1088/0963-0252/24/6/065010 |
Official URL: | https://doi.org/10.1088/0963-0252/24/6/065010 |
Date Deposited: | 18 Apr 2023 15:07 |
Last Modified: | 25 Sep 2024 16:18 |
Cite in APA 7: | Panjan, M., Loquai, S., Sapieha, J.-E., & Martinu, L. (2015). Non-uniform plasma distribution in dc magnetron sputtering : origin, shape and structuring of spokes. Plasma Sources Science and Technology, 24(6), 065010 (16 pages). https://doi.org/10.1088/0963-0252/24/6/065010 |
---|---|
Statistics
Dimensions