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Non-uniform plasma distribution in dc magnetron sputtering : origin, shape and structuring of spokes

M. Panjan, S. Loquai, Jolanta-Ewa Sapieha and Ludvik Martinu

Article (2015)

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Department: Department of Engineering Physics
PolyPublie URL: https://publications.polymtl.ca/34943/
Journal Title: Plasma Sources Science and Technology (vol. 24, no. 6)
Publisher: IOP Publishing
DOI: 10.1088/0963-0252/24/6/065010
Official URL: https://doi.org/10.1088/0963-0252/24/6/065010
Date Deposited: 18 Apr 2023 15:07
Last Modified: 05 Apr 2024 11:27
Cite in APA 7: Panjan, M., Loquai, S., Sapieha, J.-E., & Martinu, L. (2015). Non-uniform plasma distribution in dc magnetron sputtering : origin, shape and structuring of spokes. Plasma Sources Science and Technology, 24(6), 065010 (16 pages). https://doi.org/10.1088/0963-0252/24/6/065010

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