Non-uniform plasma distribution in dc magnetron sputtering : origin, shape and structuring of spokes

M. Panjan, S. Loquai, Jolanta-Ewa Sapieha and Ludvik Martinu

Article (2015)

An external link is available for this item

Department:	Department of Engineering Physics
PolyPublie URL:	https://publications.polymtl.ca/34943/
Journal Title:	Plasma Sources Science and Technology (vol. 24, no. 6)
Publisher:	IOP Publishing
DOI:	10.1088/0963-0252/24/6/065010
Official URL:	https://doi.org/10.1088/0963-0252/24/6/065010
Date Deposited:	18 Apr 2023 15:07
Last Modified:	08 Apr 2025 06:56

Cite in APA 7:	Panjan, M., Loquai, S., Sapieha, J.-E., & Martinu, L. (2015). Non-uniform plasma distribution in dc magnetron sputtering : origin, shape and structuring of spokes. Plasma Sources Science and Technology, 24(6), 065010 (16 pages). https://doi.org/10.1088/0963-0252/24/6/065010
APA 7 (HTML)ASCII CitationAtomBibTeXDOIsDublin CoreEndNote (.ENW)MARC (ISO 2709/UTF-8) (.MRC)MARC (UTF-8) (.MRK8)MARC XMLMPEG-21 DIDLMultiline CSVOAI-ORE Resource Map (Atom Format)OPENAIREOpenURL ContextObjectOpenURL ContextObject in SpanRDF+N-TriplesRDF+N3RDF+XMLReferReference Manager (.RIS)Simple Metadata

Statistics

Repository Staff Only