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XY-stage for alignment of optical elements in MOEMS

Yves-Alain Peter, H. P. Herzig and S. Bottinelli

Paper (1998)

Document published while its authors were not affiliated with Polytechnique Montréal

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PolyPublie URL: https://publications.polymtl.ca/33947/
Conference Title: Microelectronic Structures and MEMS for Optical Processing IV
Conference Location: Santa Clara, USA
Conference Date(s): 1998-09-21 - 1998-09-22
Publisher: SPIE - International Society for Optical Engineering
DOI: 10.1117/12.324279
Official URL: https://doi.org/10.1117/12.324279
Date Deposited: 18 Apr 2023 15:23
Last Modified: 05 Apr 2024 11:25
Cite in APA 7: Peter, Y.-A., Herzig, H. P., & Bottinelli, S. (1998, September). XY-stage for alignment of optical elements in MOEMS [Paper]. Microelectronic Structures and MEMS for Optical Processing IV, Santa Clara, USA. https://doi.org/10.1117/12.324279

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