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Micro-opto-mechanical systems: Study of an array of torsional micro-mirrors in an opto-mechanical switch

Yves-Alain Peter and H. P. Herzig

Paper (1997)

Document published while its authors were not affiliated with Polytechnique Montréal

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PolyPublie URL: https://publications.polymtl.ca/33937/
Conference Title: EOS Topical Meeting on Diffractive Optics
Conference Location: Savonlinna, Finland
Conference Date(s): 1997-07-07 - 1997-07-09
Official URL: http://www.polymtl.ca/pomp/doc/Peter1997EOSDOSavon...
Date Deposited: 18 Apr 2023 15:23
Last Modified: 25 Sep 2024 16:16
Cite in APA 7: Peter, Y.-A., & Herzig, H. P. (1997, July). Micro-opto-mechanical systems: Study of an array of torsional micro-mirrors in an opto-mechanical switch [Paper]. EOS Topical Meeting on Diffractive Optics, Savonlinna, Finland. http://www.polymtl.ca/pomp/doc/Peter1997EOSDOSavonlinna.pdf

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