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Combustion of effluent gases from a metal-organic vapor phase epitaxy system

P. Cova, Rémo A. Masut, C. A. Tran, A. Bensaada and John F. Currie

Article (1994)

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Department: Department of Engineering Physics
Research Center: GCM - Thin Film Physics and Technology Research Group
PolyPublie URL: https://publications.polymtl.ca/33417/
Journal Title: Combustion Science and Technology (vol. 97, no. 1-3)
Publisher: Taylor & Francis
DOI: 10.1080/00102209408935365
Official URL: https://doi.org/10.1080/00102209408935365
Date Deposited: 18 Apr 2023 15:25
Last Modified: 05 Apr 2024 11:24
Cite in APA 7: Cova, P., Masut, R. A., Tran, C. A., Bensaada, A., & Currie, J. F. (1994). Combustion of effluent gases from a metal-organic vapor phase epitaxy system. Combustion Science and Technology, 97(1-3), 1-11. https://doi.org/10.1080/00102209408935365

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