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Diode laser-induced pyrolitic decomposition of spin-coated organometallic thin films

Stéphane Evoy, Marie-Hélène Bernier, Patrick Desjardins, Ricardo Izquierdo, Michel Meunier and Edward Sacher

Paper (1993)

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Department: Department of Engineering Physics
PolyPublie URL: https://publications.polymtl.ca/33339/
Conference Title: Laser-Assisted Fabrication of Thin Films and Microstructures
Conference Location: Québec, Canada
Conference Date(s): 1993-08-17 - 1993-08-19
Publisher: SPIE - International Society for Optical Engineering
DOI: 10.1117/12.167543
Official URL: https://doi.org/10.1117/12.167543
Date Deposited: 18 Apr 2023 15:25
Last Modified: 05 Apr 2024 11:24
Cite in APA 7: Evoy, S., Bernier, M.-H., Desjardins, P., Izquierdo, R., Meunier, M., & Sacher, E. (1993, August). Diode laser-induced pyrolitic decomposition of spin-coated organometallic thin films [Paper]. Laser-Assisted Fabrication of Thin Films and Microstructures, Québec, Canada. https://doi.org/10.1117/12.167543

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