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Vacuum ultraviolet emission from microwave plasmas of hydrogen and its mixtures with helium and oxygen

A. Holländer and Michael R. Wertheimer

Article (1994)

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Department: Department of Engineering Physics
PolyPublie URL: https://publications.polymtl.ca/33217/
Journal Title: Journal of vacuum science and technology. A, Vacuum, surfaces, and films (vol. 12, no. 3)
Publisher: American Vacuum Society
DOI: 10.1116/1.579271
Official URL: https://doi.org/10.1116/1.579271
Date Deposited: 18 Apr 2023 15:25
Last Modified: 05 Apr 2024 11:24
Cite in APA 7: Holländer, A., & Wertheimer, M. R. (1994). Vacuum ultraviolet emission from microwave plasmas of hydrogen and its mixtures with helium and oxygen. Journal of vacuum science and technology. A, Vacuum, surfaces, and films, 12(3), 879-882. https://doi.org/10.1116/1.579271

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