A. Holländer and Michael R. Wertheimer
Article (1994)
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| Department: | Department of Engineering Physics |
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| PolyPublie URL: | https://publications.polymtl.ca/33217/ |
| Journal Title: | Journal of vacuum science and technology. A, Vacuum, surfaces, and films (vol. 12, no. 3) |
| Publisher: | American Vacuum Society |
| DOI: | 10.1116/1.579271 |
| Official URL: | https://doi.org/10.1116/1.579271 |
| Date Deposited: | 18 Apr 2023 15:25 |
| Last Modified: | 08 Apr 2025 06:54 |
| Cite in APA 7: | Holländer, A., & Wertheimer, M. R. (1994). Vacuum ultraviolet emission from microwave plasmas of hydrogen and its mixtures with helium and oxygen. Journal of vacuum science and technology. A, Vacuum, surfaces, and films, 12(3), 879-882. https://doi.org/10.1116/1.579271 |
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