<  Back to the Polytechnique Montréal portal

Materials processing in dual-mode microwave/radiofrequency plasmas

Jolanta-Ewa Sapieha, Ludvik Martinu and Michael R. Wertheimer

Paper (1992)

This item is not archived in PolyPublie
Department: Department of Engineering Physics
PolyPublie URL: https://publications.polymtl.ca/33159/
Conference Title: 18th International Symposium on Rarefied Gas Dynamics
Conference Location: Vancouver, BC, CAN
Conference Date(s): 1992-07-26 - 1992-07-30
Date Deposited: 18 Apr 2023 15:25
Last Modified: 05 Apr 2024 11:24
Cite in APA 7: Sapieha, J.-E., Martinu, L., & Wertheimer, M. R. (1992, July). Materials processing in dual-mode microwave/radiofrequency plasmas [Paper]. 18th International Symposium on Rarefied Gas Dynamics, Vancouver, BC, CAN.

Statistics

Stats are not available on this system.

Repository Staff Only

View Item View Item