Jolanta-Ewa Sapieha
, Ludvik Martinu and Michael R. Wertheimer
Paper (1992)
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| Department: | Department of Engineering Physics |
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| ISBN: | 1563470802 |
| PolyPublie URL: | https://publications.polymtl.ca/33159/ |
| Conference Title: | 18th International Symposium on Rarefied Gas Dynamics |
| Conference Location: | Vancouver, BC, CAN |
| Conference Date(s): | 1992-07-26 - 1992-07-30 |
| Date Deposited: | 18 Apr 2023 15:25 |
| Last Modified: | 25 Sep 2024 16:15 |
| Cite in APA 7: | Sapieha, J.-E., Martinu, L., & Wertheimer, M. R. (1992, July). Materials processing in dual-mode microwave/radiofrequency plasmas [Paper]. 18th International Symposium on Rarefied Gas Dynamics, Vancouver, BC, CAN. |
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