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Characterization of silicon-compound multilayer and graded-index optical coatings deposited by dual-frequency plasma

D. Poitras, P. Leroux, Jolanta-Ewa Sapieha, S. C. Gujrathi and Ludvik Martinu

Paper (1994)

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Department: Department of Engineering Physics
PolyPublie URL: https://publications.polymtl.ca/32938/
Conference Title: 37th Annual Technical Conference
Conference Location: Boston, MA, USA
Conference Date(s): 1994-05-08 - 1994-05-13
Publisher: Soc of Vacuum Coaters
Date Deposited: 18 Apr 2023 15:25
Last Modified: 05 Apr 2024 11:23
Cite in APA 7: Poitras, D., Leroux, P., Sapieha, J.-E., Gujrathi, S. C., & Martinu, L. (1994, May). Characterization of silicon-compound multilayer and graded-index optical coatings deposited by dual-frequency plasma [Paper]. 37th Annual Technical Conference, Boston, MA, USA.

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