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Effect of amorphous carbon layers on the growth of diamond in dual-frequency plasma

P. Reinke, Jolanta-Ewa Sapieha and Ludvik Martinu

Article (1994)

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Department: Department of Engineering Physics
PolyPublie URL: https://publications.polymtl.ca/32920/
Journal Title: Journal of Applied Physics (vol. 76, no. 10)
Publisher: American Institute of Physics
DOI: 10.1063/1.358385
Official URL: https://doi.org/10.1063/1.358385
Date Deposited: 18 Apr 2023 15:25
Last Modified: 08 Apr 2025 06:53
Cite in APA 7: Reinke, P., Sapieha, J.-E., & Martinu, L. (1994). Effect of amorphous carbon layers on the growth of diamond in dual-frequency plasma. Journal of Applied Physics, 76(10), 5754-5759. https://doi.org/10.1063/1.358385

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