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Laser fabrication of three-dimensional microstructures, cavities, and columns

Bing Shen, Ricardo Izquierdo and Michel Meunier

Paper (1993)

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Department: Department of Engineering Physics
PolyPublie URL: https://publications.polymtl.ca/32865/
Conference Title: Laser-Assisted Fabrication of Thin Films and Microstructures
Conference Location: Québec City, Canada
Conference Date(s): 1993-08-17 - 1993-08-19
Publisher: Society of photo-optical instrumentation engineers (SPIE)
DOI: 10.1117/12.167546
Official URL: https://doi.org/10.1117/12.167546
Date Deposited: 18 Apr 2023 15:25
Last Modified: 05 Apr 2024 11:23
Cite in APA 7: Shen, B., Izquierdo, R., & Meunier, M. (1993, August). Laser fabrication of three-dimensional microstructures, cavities, and columns [Paper]. Laser-Assisted Fabrication of Thin Films and Microstructures, Québec City, Canada. https://doi.org/10.1117/12.167546

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