Plasma-deposited fluorocarbon coatings for passive and active integrated optical devices

W. Wirges, S. Bauer-Gogonea, S. Bauer, R. Gerhard-Multhaupt, Ludvik Martinu and Michael R. Wertheimer

Paper (1994)

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Department:	Department of Engineering Physics
PolyPublie URL:	https://publications.polymtl.ca/32746/
Conference Title:	Nanofabrication Technologies and Device Integration
Publisher:	SPIE - International Society for Optical Engineering
DOI:	10.1117/12.180976
Official URL:	https://doi.org/10.1117/12.180976
Date Deposited:	18 Apr 2023 15:26
Last Modified:	25 Sep 2024 16:15

Cite in APA 7:	Wirges, W., Bauer-Gogonea, S., Bauer, S., Gerhard-Multhaupt, R., Martinu, L., & Wertheimer, M. R. Plasma-deposited fluorocarbon coatings for passive and active integrated optical devices [Paper]. Nanofabrication Technologies and Device Integration. https://doi.org/10.1117/12.180976
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