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Plasma-deposited fluorocarbon coatings for passive and active integrated optical devices

W. Wirges, S. Bauer-Gogonea, S. Bauer, R. Gerhard-Multhaupt, Ludvik Martinu and Michael R. Wertheimer

Paper (1994)

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Department: Department of Engineering Physics
PolyPublie URL: https://publications.polymtl.ca/32746/
Conference Title: Nanofabrication Technologies and Device Integration
Publisher: SPIE - International Society for Optical Engineering
DOI: 10.1117/12.180976
Official URL: https://doi.org/10.1117/12.180976
Date Deposited: 18 Apr 2023 15:26
Last Modified: 05 Apr 2024 11:23
Cite in APA 7: Wirges, W., Bauer-Gogonea, S., Bauer, S., Gerhard-Multhaupt, R., Martinu, L., & Wertheimer, M. R. Plasma-deposited fluorocarbon coatings for passive and active integrated optical devices [Paper]. Nanofabrication Technologies and Device Integration. https://doi.org/10.1117/12.180976

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