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Formation of TiN films using thermal plasma reactive formig

S. Grenier, K. Shankar, P. Tsantrizos and Frank Ajersch

Paper (1995)

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Additional Information: Nom historique du département: Département de métallurgie et de génie des matériaux
Department: Department of Engineering Physics
PolyPublie URL: https://publications.polymtl.ca/32217/
Conference Title: 8th International Symposium on Novel Techniques in Synthesis and Processing of Advanced Materials
Conference Date(s): 1995-01-01 - 1995-12-31
Date Deposited: 18 Apr 2023 15:24
Last Modified: 05 Apr 2024 11:22
Cite in APA 7: Grenier, S., Shankar, K., Tsantrizos, P., & Ajersch, F. (1995, January). Formation of TiN films using thermal plasma reactive formig [Paper]. 8th International Symposium on Novel Techniques in Synthesis and Processing of Advanced Materials.

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