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Effect of nitrogen on cathode spot characteristics in arc ion-plating of TiN

G. Kim, J.-L. Meunier and Frank Ajersch

Paper (1995)

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Additional Information: Nom historique du département: Département de métallurgie et de génie des matériaux
Department: Department of Engineering Physics
PolyPublie URL: https://publications.polymtl.ca/32093/
Conference Title: international symposium on plasma chemistry
Conference Location: Minneapolis
Conference Date(s): 1995-01-01 - 1995-12-31
Official URL: https://www.ispc-conference.org/ispcdocs/ispc12/co...
Date Deposited: 18 Apr 2023 15:25
Last Modified: 05 Apr 2024 11:22
Cite in APA 7: Kim, G., Meunier, J.-L., & Ajersch, F. (1995, January). Effect of nitrogen on cathode spot characteristics in arc ion-plating of TiN [Paper]. international symposium on plasma chemistry, Minneapolis. https://www.ispc-conference.org/ispcdocs/ispc12/content/12/12-2113.pdf

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