G. Kim, J.-L. Meunier and Frank Ajersch
Paper (1995)
An external link is available for this itemAdditional Information: | Nom historique du département: Département de métallurgie et de génie des matériaux |
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Department: | Department of Engineering Physics |
PolyPublie URL: | https://publications.polymtl.ca/32093/ |
Conference Title: | international symposium on plasma chemistry |
Conference Location: | Minneapolis |
Conference Date(s): | 1995-01-01 - 1995-12-31 |
Official URL: | https://www.ispc-conference.org/ispcdocs/ispc12/co... |
Date Deposited: | 18 Apr 2023 15:25 |
Last Modified: | 25 Sep 2024 16:14 |
Cite in APA 7: | Kim, G., Meunier, J.-L., & Ajersch, F. (1995, January). Effect of nitrogen on cathode spot characteristics in arc ion-plating of TiN [Paper]. international symposium on plasma chemistry, Minneapolis. https://www.ispc-conference.org/ispcdocs/ispc12/content/12/12-2113.pdf |
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