Laser processing of tungsten from WF₆ and SiH₄

Michel Meunier, Patrick Desjardins, Maleck Tabbal, Nada Elyaagoubi, Ricardo Izquierdo and Arthur Yelon

Article (1995)

An external link is available for this item

Department:	Department of Engineering Physics
PolyPublie URL:	https://publications.polymtl.ca/31910/
Journal Title:	Applied Surface Science (vol. 86, no. 1)
Publisher:	Elsevier
DOI:	10.1016/0169-4332(94)00455-2
Official URL:	https://doi.org/10.1016/0169-4332%2894%2900455-2
Date Deposited:	18 Apr 2023 15:25
Last Modified:	08 Apr 2025 06:52

Cite in APA 7:	Meunier, M., Desjardins, P., Tabbal, M., Elyaagoubi, N., Izquierdo, R., & Yelon, A. (1995). Laser processing of tungsten from WF₆ and SiH₄. Applied Surface Science, 86(1), 475-483. https://doi.org/10.1016/0169-4332%2894%2900455-2
APA 7 (HTML)ASCII CitationAtomBibTeXDOIsDublin CoreEndNote (.ENW)MARC (ISO 2709/UTF-8) (.MRC)MARC (UTF-8) (.MRK8)MARC XMLMPEG-21 DIDLMultiline CSVOAI-ORE Resource Map (Atom Format)OPENAIREOpenURL ContextObjectOpenURL ContextObject in SpanRDF+N-TriplesRDF+N3RDF+XMLReferReference Manager (.RIS)Simple Metadata

Statistics

Repository Staff Only