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Laser processing of tungsten from WF₆ and SiH₄

Michel Meunier, Patrick Desjardins, Maleck Tabbal, Nada Elyaagoubi, Ricardo Izquierdo and Arthur Yelon

Article (1995)

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Department: Department of Engineering Physics
PolyPublie URL: https://publications.polymtl.ca/31910/
Journal Title: Applied Surface Science (vol. 86, no. 1)
Publisher: Elsevier
DOI: 10.1016/0169-4332(94)00455-2
Official URL: https://doi.org/10.1016/0169-4332%2894%2900455-2
Date Deposited: 18 Apr 2023 15:25
Last Modified: 05 Apr 2024 11:22
Cite in APA 7: Meunier, M., Desjardins, P., Tabbal, M., Elyaagoubi, N., Izquierdo, R., & Yelon, A. (1995). Laser processing of tungsten from WF₆ and SiH₄. Applied Surface Science, 86(1), 475-483. https://doi.org/10.1016/0169-4332%2894%2900455-2

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