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Ion energy distributions in dual- and single-mode microwave/radio-frequency plasma

P. Reinke, S. Bureau, Jolanta-Ewa Sapieha and Ludvik Martinu

Article (1995)

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Department: Department of Engineering Physics
PolyPublie URL: https://publications.polymtl.ca/31797/
Journal Title: Journal of Applied Physics (vol. 78, no. 8)
Publisher: American Institute of Physics
DOI: 10.1063/1.359772
Official URL: https://doi.org/10.1063/1.359772
Date Deposited: 18 Apr 2023 15:25
Last Modified: 05 Apr 2024 11:21
Cite in APA 7: Reinke, P., Bureau, S., Sapieha, J.-E., & Martinu, L. (1995). Ion energy distributions in dual- and single-mode microwave/radio-frequency plasma. Journal of Applied Physics, 78(8), 4855-4858. https://doi.org/10.1063/1.359772

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