P. Reinke, S. Bureau, Jolanta-Ewa Sapieha
and Ludvik Martinu
Article (1995)
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| Department: | Department of Engineering Physics |
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| PolyPublie URL: | https://publications.polymtl.ca/31797/ |
| Journal Title: | Journal of Applied Physics (vol. 78, no. 8) |
| Publisher: | American Institute of Physics |
| DOI: | 10.1063/1.359772 |
| Official URL: | https://doi.org/10.1063/1.359772 |
| Date Deposited: | 18 Apr 2023 15:25 |
| Last Modified: | 25 Sep 2024 16:13 |
| Cite in APA 7: | Reinke, P., Bureau, S., Sapieha, J.-E., & Martinu, L. (1995). Ion energy distributions in dual- and single-mode microwave/radio-frequency plasma. Journal of Applied Physics, 78(8), 4855-4858. https://doi.org/10.1063/1.359772 |
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