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Intégration de la gravure anisotrope du silicium dans la fabrication d'un micro-administrateur pharmaceutique

Robert Antaki

Master's thesis (1996)

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Department: Department of Engineering Physics
Academic/Research Directors: John F. Currie
PolyPublie URL: https://publications.polymtl.ca/31571/
Institution: École Polytechnique de Montréal
Date Deposited: 18 Apr 2023 15:24
Last Modified: 05 Apr 2024 11:21
Cite in APA 7: Antaki, R. (1996). Intégration de la gravure anisotrope du silicium dans la fabrication d'un micro-administrateur pharmaceutique [Master's thesis, École Polytechnique de Montréal].

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