Master's thesis (1996)
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| Department: | Department of Engineering Physics |
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| Academic/Research Directors: | John F. Currie |
| PolyPublie URL: | https://publications.polymtl.ca/31571/ |
| Institution: | École Polytechnique de Montréal |
| Date Deposited: | 18 Apr 2023 15:24 |
| Last Modified: | 25 Sep 2024 16:13 |
| Cite in APA 7: | Antaki, R. (1996). Intégration de la gravure anisotrope du silicium dans la fabrication d'un micro-administrateur pharmaceutique [Master's thesis, École Polytechnique de Montréal]. |
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