S. Boughaba, Edward Sacher and Michel Meunier
Paper (1995)
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| Department: | Department of Engineering Physics |
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| PolyPublie URL: | https://publications.polymtl.ca/31472/ |
| Conference Title: | MRS Fall Symposium |
| Conference Location: | Boston, MA, USA |
| Conference Date(s): | 1995-11-27 - 1995-11-30 |
| Publisher: | Materials Research Society |
| DOI: | 10.1557/proc-397-497 |
| Official URL: | https://doi.org/10.1557/proc-397-497 |
| Date Deposited: | 18 Apr 2023 15:24 |
| Last Modified: | 25 Sep 2024 16:13 |
| Cite in APA 7: | Boughaba, S., Sacher, E., & Meunier, M. (1995, November). CO₂ laser cleaning of hydrophilic oxidized silicon surfaces [Paper]. MRS Fall Symposium, Boston, MA, USA. https://doi.org/10.1557/proc-397-497 |
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