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CO₂ laser cleaning of hydrophilic oxidized silicon surfaces

S. Boughaba, Edward Sacher and Michel Meunier

Paper (1995)

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Department: Department of Engineering Physics
PolyPublie URL: https://publications.polymtl.ca/31472/
Conference Title: MRS Fall Symposium
Conference Location: Boston, MA, USA
Conference Date(s): 1995-11-27 - 1995-11-30
Publisher: Materials Research Society
DOI: 10.1557/proc-397-497
Official URL: https://doi.org/10.1557/proc-397-497
Date Deposited: 18 Apr 2023 15:24
Last Modified: 05 Apr 2024 11:21
Cite in APA 7: Boughaba, S., Sacher, E., & Meunier, M. (1995, November). CO₂ laser cleaning of hydrophilic oxidized silicon surfaces [Paper]. MRS Fall Symposium, Boston, MA, USA. https://doi.org/10.1557/proc-397-497

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