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Low-pressure plasma processing for optoelectronics applications

Ludvik Martinu

Paper (1996)

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Department: Department of Engineering Physics
PolyPublie URL: https://publications.polymtl.ca/31053/
Conference Title: Functional Photonic and Fiber Devices
Conference Location: San Jose, CA, USA
Conference Date(s): 1996-01-30 - 1996-02-01
Publisher: Society of photo-optical instrumentation engineers (SPIE)
DOI: 10.1117/12.229949
Official URL: https://doi.org/10.1117/12.229949
Date Deposited: 18 Apr 2023 15:24
Last Modified: 05 Apr 2024 11:20
Cite in APA 7: Martinu, L. (1996, January). Low-pressure plasma processing for optoelectronics applications [Paper]. Functional Photonic and Fiber Devices, San Jose, CA, USA. https://doi.org/10.1117/12.229949

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