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Applications of laser processing for sensors and actuators

Michel Meunier, R. Izquierdo, B. Shen, A. Lecours, M. Allard, A. Bergeron, F. Hanus, S. Boughaba, Dentcho Ivanov, John F. Currie, L. Laude and Arthur Yelon

Paper (1995)

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Department: Department of Engineering Physics
Research Center: GCM - Thin Film Physics and Technology Research Group
PolyPublie URL: https://publications.polymtl.ca/31034/
Conference Title: MRS Fall Symposium
Conference Location: Boston, MA, USA
Conference Date(s): 1995-11-27 - 1995-11-30
Publisher: Materials Research Society
DOI: 10.1557/proc-397-305
Official URL: https://doi.org/10.1557/proc-397-305
Date Deposited: 18 Apr 2023 15:24
Last Modified: 05 Apr 2024 11:20
Cite in APA 7: Meunier, M., Izquierdo, R., Shen, B., Lecours, A., Allard, M., Bergeron, A., Hanus, F., Boughaba, S., Ivanov, D., Currie, J. F., Laude, L., & Yelon, A. (1995, November). Applications of laser processing for sensors and actuators [Paper]. MRS Fall Symposium, Boston, MA, USA. https://doi.org/10.1557/proc-397-305



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