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Characterization of homogeneous and inhomogeneous Si-based optical coatings deposited in dual-frequency plasma

D. Poitras, P. Leroux, Jolanta-Ewa Sapieha, S. C. Gujrathi and Ludvik Martinu

Article (1996)

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Department: Department of Engineering Physics
PolyPublie URL: https://publications.polymtl.ca/30956/
Journal Title: Optical Engineering (vol. 35, no. 9)
Publisher: SPIE - International Society for Optical Engineering
DOI: 10.1117/1.600833
Official URL: https://doi.org/10.1117/1.600833
Date Deposited: 18 Apr 2023 15:24
Last Modified: 05 Apr 2024 11:20
Cite in APA 7: Poitras, D., Leroux, P., Sapieha, J.-E., Gujrathi, S. C., & Martinu, L. (1996). Characterization of homogeneous and inhomogeneous Si-based optical coatings deposited in dual-frequency plasma. Optical Engineering, 35(9), 2693-2699. https://doi.org/10.1117/1.600833

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