Laser-micromachining silicon three-dimensional structures, tunnels, and cavities

B. Shen, M. Allard, S. Boughaba, Ricardo Izquierdo and Michel Meunier

Article (1996)

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Department:	Department of Engineering Physics
PolyPublie URL:	https://publications.polymtl.ca/30876/
Journal Title:	Canadian Journal of Physics (vol. 74, no. S1)
Publisher:	Canadian Science Publishing
DOI:	10.1139/p96-832
Official URL:	https://doi.org/10.1139/p96-832
Date Deposited:	18 Apr 2023 15:24
Last Modified:	08 Apr 2025 06:51

Cite in APA 7:	Shen, B., Allard, M., Boughaba, S., Izquierdo, R., & Meunier, M. (1996). Laser-micromachining silicon three-dimensional structures, tunnels, and cavities. Canadian Journal of Physics, 74(S1), 54-58. https://doi.org/10.1139/p96-832
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