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Laser-micromachining silicon three-dimensional structures, tunnels, and cavities

B. Shen, M. Allard, S. Boughaba, R. Izquierdo and Michel Meunier

Article (1996)

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Department: Department of Engineering Physics
PolyPublie URL: https://publications.polymtl.ca/30876/
Journal Title: Canadian Journal of Physics (vol. 74, no. S1)
Publisher: Canadian Science Publishing
DOI: 10.1139/p96-832
Official URL: https://doi.org/10.1139/p96-832
Date Deposited: 18 Apr 2023 15:24
Last Modified: 05 Apr 2024 11:20
Cite in APA 7: Shen, B., Allard, M., Boughaba, S., Izquierdo, R., & Meunier, M. (1996). Laser-micromachining silicon three-dimensional structures, tunnels, and cavities. Canadian Journal of Physics, 74(S1), 54-58. https://doi.org/10.1139/p96-832

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