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A design and implementation methodology for micromachining

R. N. Tait, L. M. Landsberger, John F. Currie, G. H. McKinnon, M. Parameswaran, A. M. Robinson and D. J. Gale

Paper (1996)

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Department: Department of Engineering Physics
PolyPublie URL: https://publications.polymtl.ca/30847/
Conference Title: Canadian Conference on Electrical and Computer Engineering : Glimpse into the 21st century
Conference Location: Calgary, AB, Canada
Conference Date(s): 1996-05-26 - 1996-05-29
Publisher: Institute of Electrical and Electronics Engineers
DOI: 10.1109/ccece.1996.548041
Official URL: https://doi.org/10.1109/ccece.1996.548041
Date Deposited: 18 Apr 2023 15:24
Last Modified: 05 Apr 2024 11:20
Cite in APA 7: Tait, R. N., Landsberger, L. M., Currie, J. F., McKinnon, G. H., Parameswaran, M., Robinson, A. M., & Gale, D. J. (1996, May). A design and implementation methodology for micromachining [Paper]. Canadian Conference on Electrical and Computer Engineering : Glimpse into the 21st century, Calgary, AB, Canada. https://doi.org/10.1109/ccece.1996.548041

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