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Mechanical and dielectric properties of low permittivity dielectric materials

Avni Alptekin, G. Czeremuszkin, Ludvik Martinu, Michel Meunier, Edward Sacher and M. DiRenzo

Paper (1996)

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Department: Department of Engineering Physics
Research Center: GCM - Thin Film Physics and Technology Research Group
PolyPublie URL: https://publications.polymtl.ca/30726/
Conference Title: MRS Fall Meeting
Conference Location: Boston, MA, USA
Conference Date(s): 1996-12-02 - 1996-12-03
Publisher: MRS
DOI: 10.1557/proc-443-79
Official URL: https://doi.org/10.1557/proc-443-79
Date Deposited: 18 Apr 2023 15:23
Last Modified: 08 Apr 2025 02:21
Cite in APA 7: Alptekin, A., Czeremuszkin, G., Martinu, L., Meunier, M., Sacher, E., & DiRenzo, M. (1996, December). Mechanical and dielectric properties of low permittivity dielectric materials [Paper]. MRS Fall Meeting, Boston, MA, USA. https://doi.org/10.1557/proc-443-79

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