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Directional effects during ion implantation: lateral mass transport and anisotropic growth

M. Chicoine, S. Roorda, L. Cliche and Rémo A. Masut

Article (1997)

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Department: Department of Engineering Physics
PolyPublie URL: https://publications.polymtl.ca/30576/
Journal Title: Physical review. B, Condensed matter (vol. 56, no. 3)
Publisher: American Physical Society
DOI: 10.1103/physrevb.56.1551
Official URL: https://doi.org/10.1103/physrevb.56.1551
Date Deposited: 18 Apr 2023 15:23
Last Modified: 05 Apr 2024 11:20
Cite in APA 7: Chicoine, M., Roorda, S., Cliche, L., & Masut, R. A. (1997). Directional effects during ion implantation: lateral mass transport and anisotropic growth. Physical review. B, Condensed matter, 56(3), 1551-1560. https://doi.org/10.1103/physrevb.56.1551

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