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Oxidation and ablation of polymers by vacuum-UV radiation from low pressure plasmas

A. C. Fozza, J. Roch, Jolanta-Ewa Sapieha, A. Kruse, A. Holländer and Michael R. Wertheimer

Article (1997)

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Department: Department of Engineering Physics
Research Center: GCM - Thin Film Physics and Technology Research Group
PolyPublie URL: https://publications.polymtl.ca/30472/
Journal Title: Nuclear Instruments & Methods in Physics Research. Section B, Beam Interactions With Materials and Atoms (vol. 131, no. 1-4)
Publisher: Elsevier
DOI: 10.1016/s0168-583x(97)00154-7
Official URL: https://doi.org/10.1016/s0168-583x%2897%2900154-7
Date Deposited: 18 Apr 2023 15:23
Last Modified: 25 Sep 2024 16:12
Cite in APA 7: Fozza, A. C., Roch, J., Sapieha, J.-E., Kruse, A., Holländer, A., & Wertheimer, M. R. (1997). Oxidation and ablation of polymers by vacuum-UV radiation from low pressure plasmas. Nuclear Instruments & Methods in Physics Research. Section B, Beam Interactions With Materials and Atoms, 131(1-4), 205-210. https://doi.org/10.1016/s0168-583x%2897%2900154-7

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