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Tribological study of CNₓ films prepared by reactive d.c. magnetron sputtering

V. Hajek, K. Rusnak, J. Vlcek, Ludvik Martinu and H. M. Hawthorne

Article (1997)

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Department: Department of Engineering Physics
PolyPublie URL: https://publications.polymtl.ca/30418/
Journal Title: Wear (vol. 213, no. 1-2)
Publisher: Elsevier
DOI: 10.1016/s0043-1648(97)00176-2
Official URL: https://doi.org/10.1016/s0043-1648%2897%2900176-2
Date Deposited: 18 Apr 2023 15:23
Last Modified: 05 Apr 2024 11:19
Cite in APA 7: Hajek, V., Rusnak, K., Vlcek, J., Martinu, L., & Hawthorne, H. M. (1997). Tribological study of CNₓ films prepared by reactive d.c. magnetron sputtering. Wear, 213(1-2), 80-89. https://doi.org/10.1016/s0043-1648%2897%2900176-2

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