Tribological study of CNₓ films prepared by reactive d.c. magnetron sputtering

V. Hajek, K. Rusnak, J. Vlcek, Ludvik Martinu and H. M. Hawthorne

Article (1997)

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Department:	Department of Engineering Physics
Research Center:	GCM - Thin Film Physics and Technology Research Group
PolyPublie URL:	https://publications.polymtl.ca/30418/
Journal Title:	Wear (vol. 213, no. 1-2)
Publisher:	Elsevier
DOI:	10.1016/s0043-1648(97)00176-2
Official URL:	https://doi.org/10.1016/s0043-1648%2897%2900176-2
Date Deposited:	18 Apr 2023 15:23
Last Modified:	25 Sep 2024 16:12

Cite in APA 7:	Hajek, V., Rusnak, K., Vlcek, J., Martinu, L., & Hawthorne, H. M. (1997). Tribological study of CNₓ films prepared by reactive d.c. magnetron sputtering. Wear, 213(1-2), 80-89. https://doi.org/10.1016/s0043-1648%2897%2900176-2
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