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Effect of interface on the characteristics of functional films deposited on polycarbonate in dual-frequency plasma

Jolanta-Ewa Sapieha, D. Poitras, Ludvik Martinu, N. L. S. Yamasaki and C. W. Lantman

Article (1997)

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Department: Department of Engineering Physics
PolyPublie URL: https://publications.polymtl.ca/30341/
Journal Title: Journal of vacuum science and technology. A, Vacuum, surfaces, and films (vol. 15, no. 3)
Publisher: American Vacuum Society
DOI: 10.1116/1.580792
Official URL: https://doi.org/10.1116/1.580792
Date Deposited: 18 Apr 2023 15:23
Last Modified: 05 Apr 2024 11:19
Cite in APA 7: Sapieha, J.-E., Poitras, D., Martinu, L., Yamasaki, N. L. S., & Lantman, C. W. (1997). Effect of interface on the characteristics of functional films deposited on polycarbonate in dual-frequency plasma. Journal of vacuum science and technology. A, Vacuum, surfaces, and films, 15(3), 985-991. https://doi.org/10.1116/1.580792

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