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Surface characterization of excimer laser induced deposition of W on GaAs from WF₆ and H₂

Malek Tabbal, Ricardo Izquierdo, Michel Meunier, Corinne Pépin and Arthur Yelon

Article (1997)

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Department: Department of Engineering Physics
Research Center: GCM - Thin Film Physics and Technology Research Group
Funders: CRSNG / NSERC, Fonds pour la Formation de Chercheurs et l'Aide à la Recherche (FCAR) of Québec.
PolyPublie URL: https://publications.polymtl.ca/30041/
Journal Title: Applied Surface Science (vol. 108, no. 4)
Publisher: Elsevier
DOI: 10.1016/s0169-4332(96)00691-5
Official URL: https://doi.org/10.1016/s0169-4332%2896%2900691-5
Date Deposited: 18 Apr 2023 15:23
Last Modified: 05 Apr 2024 11:19
Cite in APA 7: Tabbal, M., Izquierdo, R., Meunier, M., Pépin, C., & Yelon, A. (1997). Surface characterization of excimer laser induced deposition of W on GaAs from WF₆ and H₂. Applied Surface Science, 108(4), 417-424. https://doi.org/10.1016/s0169-4332%2896%2900691-5

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