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Laser-chemical vapor deposition of W Schottky contacts on GaAs using WF₆ and SiH₄

Malek Tabbal, Michel Meunier, Ricardo Izquierdo, Bénédicte Beau and Arthur Yelon

Article (1997)

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Department: Department of Engineering Physics
Research Center: GCM - Thin Film Physics and Technology Research Group
PolyPublie URL: https://publications.polymtl.ca/30040/
Journal Title: Journal of Applied Physics (vol. 81, no. 10)
Publisher: American Institute of Physics
DOI: 10.1063/1.365199
Official URL: https://doi.org/10.1063/1.365199
Date Deposited: 18 Apr 2023 15:23
Last Modified: 05 Apr 2024 11:19
Cite in APA 7: Tabbal, M., Meunier, M., Izquierdo, R., Beau, B., & Yelon, A. (1997). Laser-chemical vapor deposition of W Schottky contacts on GaAs using WF₆ and SiH₄. Journal of Applied Physics, 81(10), 6607-6611. https://doi.org/10.1063/1.365199

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