NSERC (Natural Sciences and Engineering Research Council of Canada) Industrial research chair on `Low pressure plasma processing of materials'

Michael R. Wertheimer, Ludvik Martinu and Jolanta-Ewa Sapieha

Article (1997)

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Department:	Department of Engineering Physics
PolyPublie URL:	https://publications.polymtl.ca/29978/
Journal Title:	Plasmas and Polymers (vol. 2, no. 1)
Publisher:	Springer
DOI:	10.1007/bf02765660
Official URL:	https://doi.org/10.1007/bf02765660
Date Deposited:	18 Apr 2023 15:23
Last Modified:	25 Sep 2024 16:11

Cite in APA 7:	Wertheimer, M. R., Martinu, L., & Sapieha, J.-E. (1997). NSERC (Natural Sciences and Engineering Research Council of Canada) Industrial research chair on `Low pressure plasma processing of materials'. Plasmas and Polymers, 2(1), 53-64. https://doi.org/10.1007/bf02765660
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